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lithography-cd-control-jmp
lithography-cd-control-jmp PublicJMP-based lithography line-width CD control, SPC, ANOVA, and process capability analysis using NIST wafer data.
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lithography-focus-dose-yield-analysis-jmp
lithography-focus-dose-yield-analysis-jmp PublicJMP-based lithography focus-dose process window and yield analysis using public exposure and inspection data.
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wafer-level-ic-yield-analysis-jmp
wafer-level-ic-yield-analysis-jmp PublicWafer-level IC yield analysis using JMP for semiconductor pilot manufacturing process comparison.
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mems-piezoresistive-pressure-sensor
mems-piezoresistive-pressure-sensor PublicFabrication and characterization of a MEMS piezoresistive pressure sensor using silicon micromachining, photolithography, ion implantation, metallization, anodic bonding, and device testing.
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